The newest addition to the MS-50 series
is ideal for precise, quantitative leak measurements when
extreme sensitivity is required: semiconductor, electronics,
and packaging industries; instrumentation, physics research and
development as well as the medical and pharmaceutical
industries.
The MS-50 High-Sensitivity Dry offers the
highest leak-rate sensitivity and the broadest testing range
available today:
• Sensitivity: 3.0 x 10-12 atm-cc/sec
• Leak range: 3.0 x 10-12 to
1 atm-cc/sec
• No LN2 required
• Direct flow vacuum operation
response time <2 seconds
• Oil-free pumping ideal for use in
clean-rooms and other environments where contamination is a
concern
• Dual pump system with dedicated
dry foreline and dry roughing pumps
• Simple one-button power-up has
system ready to test in less than 3 minutes
• Fully automatic start-up, tuning
and calibration• Roughing pump: 10 cfm scroll pump
• Foreline pump: 5 dual stage
diaphraghm/molecular drag
• 62 liters/sec turbo-molecular high
vacuum pump
• 50 programmable test recipes
• CE units available
• The High-Sensitivity includes all
standard features of the familiar line of the MS-50 leak detectors
• The MS-50 Series is available in a
variety of standard and custom configurations to meet
your specific requirements.
